光子晶体面发射激光器（PCSEL）利用二维光子晶体光栅的布拉格共振实现面发射激光，具有其独特的优势，包括单模性能、在片测试、高功率、低发散角等。相比垂直腔面发射激光器（VCSEL），PCSEL有将近两倍的有源区光限制因子，展现出高速运行的潜力。本文探讨了PCSEL的基本结构和工作原理，并详细分析了影响PCSEL激光器实现高速性能的关键因素。随后，文章系统地介绍了近年来研究者们为实现PCSEL高速性能所做的努力，重点聚焦于通过增强PCSEL的面内限制来缩小激光腔，并提供了相关的研究方向和指导。

高速垂直腔面发射激光器（VCSEL）是高速光通信的主要光源之一，受数据流量的迅速增长牵引，高速VCSEL正向更大带宽、更高速率方向发展。长春光机所团队通过优化VCSEL外延设计和生长、器件设计和制备、以及性能表征技术，在多个波长的高速VCSEL的调制带宽、传输速率、模式、功耗等性能方面取得了显著进展。实现高速单模940 nm VCSEL 27.65 GHz调制带宽和53 Gbit/s传输速率；通过波分复用基于850 nm、880 nm、910 nm和940 nm高速VCSEL实现200 Gbit/s链路方案；通过光子寿命优化，实现高速VCSEL低至100 fJ/bit的超低能耗；实现1030 nm高速VCSEL 25 GHz调制带宽；实现1550 nm 高速VCSEL 37 Gbit/s传输速率。研制的高速VCSEL在光通信等领域有重要应用前景。

制备了不同氧化孔径的940 nm垂直腔面发射激光器（VCSEL），选取氧化孔径为3，6，9 μm的VCSEL进行了测试表征分析。氧化孔径为3，6，9 μm的VCSEL的最高输出功率分别为2.92，6.79，10.49 mW，调制带宽分别为27.65，23.34，20.56 GHz。此外，氧化孔径为3 μm的VCSEL在整个工作电流下都可实现单模工作，氧化孔径为6 μm和9 μm的VCSEL在较大电流下呈现少模和多模特性。最后，选取3 μm氧化孔径的VCSEL进行数据传输测试，在非归零（NRZ）码下实现了传输速率53 Gbit/s。

We experimentally demonstrate for the first time to our knowledge electrically injected vertical-cavity surface-emitting lasers (VCSELs) with post-supported high-contrast gratings (HCGs) at 940 nm. The HCG-VCSELs have two posts to support the air-suspended HCGs, which are realized by simple fabrication without critical point drying. The HCG-VCSEL achieves a threshold current of about 0.65 mA and a side-mode suppression ratio of 43.6 dB under continuous-wave operation at 25°C. Theoretically the HCG-VCSEL with a λ/2-cavity for the transverse magnetic polarization has a smaller effective mode length of 1.38·(λ/n). Thus, the relaxation resonance frequency can be increased by 16% compared with that of the conventional VCSEL. The modulation speed of 100 Gbit/s for the HCG-VCSEL is expected in the on–off keying modulation format. Our easy design of HCG-VCSELs has great potential for applications in optical interconnects, sensing, illumination, and so on.

Vertical-cavity surface-emitting lasers (VCSELs) are the ideal optical sources for data communication and sensing. In data communication, large data rates combined with excellent energy efficiency and temperature stability have been achieved based on advanced device design and modulation formats. VCSELs are also promising sources for photonic integrated circuits due to their small footprint and low power consumption. Also, VCSELs are commonly used for a wide variety of applications in the consumer electronics market. These applications range from laser mice to three-dimensional (3D) sensing and imaging, including various 3D movement detections, such as gesture recognition or face recognition. Novel VCSEL types will include metastructures, exhibiting additional unique properties, of largest importance for next-generation data communication, sensing, and photonic integrated circuits.